An advanced X-ray diffraction and refectometry instrument for thin films, the Smartlab XE by Rigaku, has been installed and is now available for material characterization and metrology.
Typical applications for thin films are the determination of the crystalline phase, lattice parameter, defects in epitaxial films, thickness and density of layers. Other than thin films, massive polycrystalline samples like sputtering targets can be characterized as well, using either parallel-beam or Bragg-Brentano geometry.
More informations are available on the relative equipment page
