Wet Bench Sol-Gel

Details

Manufacturer

SPM

Website

https://www.spm-semiconductor.it/

Contact person

Andrea Scaccabarozzi, Gianluca Cannetti

Location

This wet bench is used primarily for sol-gel processes.

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Dicing Saw – Disco DAD341

Disco

Wafer Cleaning Station – Disco DCS141

Disco

Ball Bonder – Kulicke & Soffa 4124

Kulicke & Soffa

Rapid Thermal Annealer – UniTemp RTP-150-HV

UniTemp

Tube Furnace – Carbolite Gero KST 12/600

Carbolite Gero

Muffle Furnace – Nabertherm LT 9/11 SKM

Nabertherm

Drying Oven – Thermo Scientific Heraeus UT 6120

Thermo Scientific Heraeus

Drying Oven – Thermo Scientific Heraeus UT 6060

Thermo Scientific Heraeus

Plasma Asher – PVA TEPLA 200

PVA TePla AG

Sputter Coater – Anatech Hummer 6.2

Anathech USA

Spin Coater – POLOS SPIN150i

POLOS

Spin Rinser Dryer – Semitool

Semitool

Wafer Mounting Station – Kulicke & Soffa Model 961

Kulicke & Soffa

Wet Bench Backend – Robotank

Robotank

Wet Bench Glovebox – Robotank

Robotank