Wet Bench Single Wafers Etching – SPM
Details
Manufacturer
SPM
Contact person
Andrea Scaccabarozzi, Gianluca Cannetti
Location
Description:
The bench is equipped with 1 Teflon tank for HF etching, 2 heated acid etch tanks, 2 dump rinse tanks and a tools cleaning tank.
Working principle
The tanks are built for single wafer etching, in order to save reagents; the acid part (HF and the other 2 heated tanks) have the local manual controlled drain setup.
Specifications
Supplied with DI Water at 18 MOhm.
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