Wet Bench Lithography – Robotank
Details
Manufacturer
Robotank
Website
Contact person
Chiara Nava, Andrea Scaccabarozzi
Location
Description:
The bench is equipped with 2 heated-closed loop drain chemical tanks, a faucet rinse tank and 2 dump rinse tanks.
Working principle
The bench is holding a Developing Solution Bath and a Stripper Solution Bath; both are heated and have the drain operated by PoliFab staff for solvent controlled disposal
Specifications
Supplied with DI Water at 18 MOhm
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