Thin-Film Mapping – Filmetrics F54-XY-200-UVX

The Filmetrics F54-XY-200-UVX is an automated thin-film thickness mapping system, measuring thin-film thickness in different specified locations on samples up to 200 mm by 200 mm. Its motorized X-Y stage allows automated positioning and measurement speeds up to two points/second. Predefined map patterns are available, and custom ones can be created with no limit on point number. An integrated microscope and live video camera allow exact monitoring of the film thickness measurement spot for measurement on patterned samples, as well as improved performance on rougher materials.

When light encounters an interface between two materials, it is partially reflected. The wave-like nature of light causes reflections from multiple interfaces (φ1, φ2) to interfere with each other, resulting in oscillations in the spectrum of the reflected light (see image).

From the frequency of these oscillations, the distance between the different interfaces is determined and thus, the thickness d of the thin film (with more oscillations meaning greater thickness). Other material characteristics are also measured, such as refractive index and roughness. For the analysis of the spectra, our FILMapper software uses two analysis modes: Spectrum-Matching and FFT. In Spectrum- Matching mode, you can analyze thickness, as well as refractive index, whereas FFT mode is only for thickness but is often more robust for thicker films.

• Thickness Range: 4 nm – 115 µm
• Min. Thickness to measure n and k: 50 nm
• Accuracy: 1 nm or 0.2%
• Precision: 0.02 nm
• Stability: 0.05 nm
• Wavelength range: 190-1700 nm
• Sample size: ≤ 200mm diameter
• Speed: 5points – 5sec. 25points – 14sec. 56points – 29sec.