Spin Rinser Dryer – Verteq

Details

Manufacturer
Verteq (now Akrion)
Contact person
Stefano Bigoni, Chiara Nava
Location

Description:

The rinser dryer is able to load a cassette of 25 6” wafers.

Rinsing is performed rotating the cassette and spraying 18 MOhm DI water, drying is performed by electronic grade N2 while rotating the cassette.

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