Spin Module with Hot Plate – Sawatec SM-200/HP-200duo
Details
Description:
The Sawatec SM-200/HP-200duo is a combination of a spin coater and a hot plate in one cabinet.
The Spin Module SM-200 allows for semi-automatic coating of thin layers, with automatic dispensing of different media and manual loading/unloading. The innovative RCCT system (Round-Closed-Chamber-Technology) effectively reduces air turbulence over the rotating substrate and improves the coating uniformity.
Features:
- Up to 50 programmes with 24 segments each can be programmed
- Process parameters: speed, acceleration, time
- Rotational direction can be selected (CW, CCW)
- RCCT system (Round-Closed-Chamber-Technology)
- Dynamic dispense arm prepared for up to 4 media lines
- Manual loading and unloading of the substrates
- Substrate fixation via vacuum and safety interlock protection
The HP-200 hotplate was developed for precise soft and hard bake processes in lithography, MEMS and similar applications. The temperature range is designed for up to 250 °C by default. The set temperature and the temperature profile have narrow margins, meaning that a high coating quality can be achieved. It can be used for substrates with a diameter of up to 200 mm and thicknesses of 18 mm at maximum.
Features:
- Temperature control with digital target and actual value display
- Automatic temperature limit switch, no overheating
- Heating ramp up possible with 20 program-steps
- Proximity as well as loading pins, adaptable to different substrate sizes
- Manual substrate fixation via vacuum
Specifications
Spin Module SM-200
- Speed range: 1 to 6’000 rpm +/-1 rpm (optional 10’000 rpm for wafers smaller than 8″)
- Speed acceleration: 0 – 6’000 rpm in 0,8 sec.
- Delay: 6’000 – 0 rpm in 0,8 sec.
- Up to 50 programmes with 24 segments each
- Process time up to 7’200 seconds with 0,1 sec. steps
- Dosing time depends on pump type
Hotplate HP-200
- Temperature range: ambient temperature up to 250°C
- Temperature accuracy: +/- 0.6°C at 100°C
- Electrical driven proximity and loading pins (stroke 8 mm)
- Program controlled adjustable proximity pins (0.1 mm increments)
- Heating ramp up possible with 24 program-steps
- Pin-circle-diameters Ø 45mm (2″) / Ø 92mm (4″) / Ø 142mm (6″) / Ø 192mm (8″)