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Deposition
Sputtering cluster – Polyteknik Flextura 200
Polyteknik AS
Sputtering Cluster – Evatec Clusterline 200E
Evatec
E-beam Evaporator – Unaxis BAK 640
Unaxis
Thermal Evaporator – Moorfield MINILAB-080
Moorfield
Sputtering – Leybold LH Z400
Leybold
Sputtering System – AJA ATC Orion 8
AJA International Inc.
Yamamoto Wafer Electroplating Set
Yamamoto
Ceradrop – CeraPrinter F-Serie
Ceradrop
LASSE (LAyered Structures for Spin Electronics)
Wet Bench Electrodeposition – SPM
SPM
Other areas
Lithography
Deposition
Etching
Characterization
Back End
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