Characterization

Vacuum Probe Station – ARS PS-L Flow Cryostat

Advanced Research Systems

SEM with EDX + EBL – LEO 1525 + Raith Elphy Plus

LEO/ZEISS and RAITH

X-Ray Diffractometer Rigaku SmartLab XE

Rigaku

Profilometer – KLA Tencor P-17

KLA TENCOR

Thin-Film Mapping – Filmetrics F54-XY-200-UVX

Filmetrics

Spectroscopic Ellipsometer – J.A. Woollam VASE

J.A. Woollam

Optical Profiler – Filmetrics Profilm3D

Filmetrics

AFM System – Keysight 5600LS

Keysight Technologies

Optical Microscope – Mitutoyo MF-Hyper

Mitutoyo

Optical Microscope – Leica FTM 200

Leica

Sheet Resistance Measurement – Jandel 4-point probe

Jandel

Prism Coupler – Metricon 2010

Metricon

Optical Microscope – Nikon Eclipse ME600

Nikon

Probe Station – SÜSS MicroTec PM5

SÜSS MicroTec AG

Spectroscopic Ellipsometer – J.A. Woollam VASE (Remote Access)

J.A. Woollam

Other areas

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