Wet Bench Multi Wafers Etching – SPM
Details
Manufacturer
SPM
Website
Contact person
Andrea Scaccabarozzi, Gianluca Cannetti
Location
Description:
The bench is equipped with 2 heated-closed loop drain chemical tanks for Solvents and KOH, 1 Teflon tank for HF etching, 2 heated acid etch tanks and 2 dump rinse tanks.
Working principle
The solvents side of the bench has manually operated drain, the acid part (HF and the other 2 heated tanks) has the automatic controlled drain setup.
Specifications
Supplied with DI Water at 18 MOhm.
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